200mm Ashing System (DAS2000)

See Larger Picture : 200mm Ashing System (DAS2000)

Company Name:Psk Inc.
Membership:Free Member
Member Since:2003. 02.28
Country/Region:Korea
City:Gyeonggi-do
Contact:Seong-eun Kim
Related Keywords:wafer fabrication systems, photoresist strip providing, ashing system, lite etching system, etching

Share to :

Contact Now* Send an Inquiry to this supplier.

Start Order * Name your price

Browse by Category

You may also be intersted in: ashing systemzivis iietchingtsl3000lite etching systemprofilerlite etching systembeverage processing machinerypattern profiling systemdry cleaning system

Psk Inc.
[Korea]

Address: 2-12 Seoku-dong, Hwaseong-si Gyeonggi-do

Phone: 82-31-6608611

Contact name: Seong-eun Kim

Report Item

Product Details

Quick Information

Model Number : DAS2000 Series

Description

Introduced in 1997 and designed for photoresist strip providing high productivity and low CoO/CoC performances. Featuring modular design of mainframe and two single type process chambers configured with downstream microwave plasma module on top of each process chamber.

DAS2000 system provides a compact system design with high repeatability and residue free process using microwave plasma source. DAS2000 system integrates the production proven technologies to offer high throughput implant strip and post etch clean process solution. The downstream microwave source delivers the excellent process control and damage free to the underlying exposed film.

DAS2000 system also provides photoresist popping free solution in high dosed implanted process with ISBP (In-Situ Bake Process) which is solely company patented.

DAS2000 Specification
System	6 ~ 8 Inch wafer
Electrical requirement	208 VAC, 3 Phases, 5 Wires
Temp. control range	80~300CãÂÂÂÂ
Dimension (mm)	890W x 1,900D x 1,970H
Transfer system	Two cassette stages ,Dual arm robot
Cooling stage	One water cooled cooling station
Power Source	MicrowaveãÂÂÂÂ
Software	Window NT base
Throughput	120/Hour (Mechanical Throughput)ãÂÂÂÂ
Process gas	O2,N2 (N2/H2,CF4 is optional)
Application	High Energy / Medium Current / High Dose Imp / Gate / Bit Line / Capacitor / Contact / Via / Pad / Descum

Product Image

Buyer	Transaction Information	Feed Back
No Data.

Other products from this supplier

Related products from premium suppliers on EC21

Send an Inquiry to this supplier

Send an Inquiry to this supplier
* From
To	Seong-eun Kim Psk Inc.
* Buying Product	- Please enter your specific buying item. e.g. 42 inch LCD TV, leather executive chair Category : Other Manufacturing & Processing Machinery
* Message	Use English only Max. 2000 characters. (Min. 20) Send
EC21.com does not guarantee the validity of product information or the credentials of sellers.